Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices

dc.contributor.author	Nguyen Van Toan
dc.contributor.author	Truong Thi Kim Tuoi
dc.contributor.author	Nguyen Van Hieu
dc.contributor.author	Takahito Ono
dc.date.accessioned	2020-12-13T13:38:06Z
dc.date.available	2020-12-13T13:38:06Z
dc.date.issued	2020-12
dc.identifier.uri	http://178.128.82.242:8080/xmlui/handle/123456789/2539
dc.subject	Vật lý - Địa cầu và Hải dương
dc.title	Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices